WO3 film, which can be prepared by RF magnetron sputtering, may be used as an electrochromic film to assemble an all-solid-state smart window. As you may have known, smart window is considered to be one of the most promising new energy-saving materials. In this regard, some experts have prepared a tungsten trioxide film by this method and tested various properties of the deposited film.
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So, what are the process conditions for preparing WO3 films by RF magnetron sputtering? The ultimate vacuum of the coating chamber was 1×10-3Pa, and the sputtering target was a sintered WO3 ceramic target with a target area of 78cm2. The purity of the sputtering gas argon gas and the working gas oxygen are both 99.999%, the total pressure of the sputtering gas is 1.1-2Pa, the partial pressure of oxygen is 0.1-0.2Pa, the target power density is 1.4-1.9W/cm2, and the deposition rate is 6- 8nm/min, deposition time is 15-20 min. The effective area of the deposited electrochromic film was 5cm x 5cm. The performance test results of the deposited tungsten oxide film are as follows: visible light transmittance in bleached state is higher than 82%; visible light transmittance in colored state is lower than 20%; response time is shorter than 10s; open storage time is longer than 24h (ΔT>20%); cycle period is greater than 105 times; working voltage is less than ±1.9V.
