Tungsten oxide film has good electrochromic properties, so that it can be used to produce a smart window, which is often used in energy-saving buildings for achieving the purpose of high heat insulation, high heat preservation, energy conservation and environmental protection. In addition, such smart thermal insulating windows can also prevent glare and UV rays. Then, do you know what method can be used to produce the tungsten trioxide film. It is reported that WO3 film can be prepared by chemical vapor deposition (CVD) method.
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Chemical vapor deposition includes plasma enhanced CVD method and gas phase pyrolysis. The reaction source is generally tungsten hexacarbonyl (W(CO)6) or WF6. This method has a fast deposition rate and adjustable deposition composition. Some experts use tungsten wire as heating resistor and evaporation source to deposit WO3 film on silicon wafer substrate and form nanostructure array. This method is called hot wire CVD method.
