Ti-doped WOx film is a type of electrochromic material that may be used to assemble an electrochromic device for energy-saving. And such film is a doping modification for improving the electrochromic properties of WOx films. Some experts adopted magnetron reactive sputtering process to prepare Ti doped WOx electrochromic films on ITO glass with pure tungsten and pure titanium as targets.
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The electrochromic properties and structure of the Ti doped WOx films were also analyzed by the transmission spectrum and XRD diffraction. The influence mechanism of Ti doping on the electrochromic properties and microstructure of WOx film was studied. They found that Ti doping does not reduce the electrochromic performance of WOx films, but also significantly increases the cycle life of the film, shortens response time, and improves memory storage. XRD analysis showed that the WOx film after doping with Ti was still amorphous, and the amorphous state had a tendency to increase.